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Proceedings Paper

An optical differential probe for measurement of MEMS topography
Author(s): Z. Li; K. Herrmann; F. Pohlenz
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Paper Abstract

Topography measurements of MEMS devices are one of the helpful approaches for MEMS devices' quality control, performance evaluation, design optimization, etc. In order to fulfill the requirement to determine the surface topography of a MEMS actuator, especially those of comb-drive types, in which the surface under test is in general discontinuous, a novel principle of an optical differential probe is proposed, in which a common-path laser interferometer and a confocal position sensor are integrated. Details of design and development of the novel differential probe are discussed, including the influence of the geometrical dimensions of the microstructure under test onto the measurement results, basic criteria for the design of the afocal subsystem and edge determination with confocal microscopy. Experimental results verify that the proposed novel approach is applicable.

Paper Details

Date Published: 27 April 2006
PDF: 9 pages
Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880D (27 April 2006); doi: 10.1117/12.662985
Show Author Affiliations
Z. Li, Physikalisch-Technische Bundesanstalt (Germany)
K. Herrmann, Physikalisch-Technische Bundesanstalt (Germany)
F. Pohlenz, Physikalisch-Technische Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 6188:
Optical Micro- and Nanometrology in Microsystems Technology
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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