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Proceedings Paper

Microspectroscopy with terahertz bioMEMS
Author(s): Tahsin Akalin; Anthony Treizebré
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Paper Abstract

Biological applications require more and more compact, sensitive and reliable microsystems. We will present solutions in order to realize a "microspectroscopy" up to Terahertz frequencies of various biological entities (living cell, neurons, proteins...). We investigate these entities in liquid phase. In a recent work, we have demonstrated a solution to excite efficiently a single wire transmission line [1]. The propagation mode is similar to a surface plasmon and known as a Goubau-mode [2]. The wire we used is extremely thin compared to other recent solutions at terahertz frequencies. There are three orders of magnitude in the size of the wire used by K. Wang and D.M. Mittleman. Typically the wire's width is 1μm compared to the 900μm diameter metal wire in [3]. Moreover our solution is in a planar configuration which is more suitable for microfluidic applications. We benefit from the high confinement of the electromagnetic field around this very thin gold wire to optimize the sensitivity of these Terahertz BioMEMS. Microfluidic channels are placed below the strip in a perpendicular direction. We will first present some properties of the Planar Goubau-Line (PGL) [4] and the measurements results obtained with structures fabricated on glass and quartz substrates. In a last part resonant structures and Mach-Zehnder type interferometers will also be presented.

Paper Details

Date Published: 21 April 2006
PDF: 11 pages
Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860E (21 April 2006); doi: 10.1117/12.662966
Show Author Affiliations
Tahsin Akalin, IEMN, CNRS, Univ. des Sciences et Technologies de Lille (France)
Anthony Treizebré, IEMN, CNRS, Univ. des Sciences et Technologies de Lille (France)

Published in SPIE Proceedings Vol. 6186:
MEMS, MOEMS, and Micromachining II
Hakan Ürey; Ayman El-Fatatry, Editor(s)

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