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Proceedings Paper

Nanometrology for MEMS: combination of optical interference, atomic force microscopy, and nanoindentor-based actuator
Author(s): Marc Jobin; Philippe Passeraub; Raphael Foschia
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Paper Abstract

We show the integration of a home-made interference optical microscope (IOM) with an Atomic force microscope, as well as the combination of IOM with a nanoindentor. Such combined instruments have many applications in the characterisation of MEMS/NEMS. As an illustrative example, we have used a MEMS accelerometer with capacitive read-out. Surface topography and defects have been measured with an IOM/AFM setup, as well as the bending and the torsion of the inertial mass while a calibrated force is applied with the nanoindentor probe on an off-axis location of the inertial mass.

Paper Details

Date Published: 28 April 2006
PDF: 8 pages
Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880T (28 April 2006); doi: 10.1117/12.662868
Show Author Affiliations
Marc Jobin, Ecole d'Ingénieurs de Genève (Switzerland)
NanoFeel (Switzerland)
Philippe Passeraub, Ecole d'Ingénieurs de Genève (Switzerland)
Raphael Foschia, Ecole d'Ingénieurs de Genève (Switzerland)
NanoFeel (Switzerland)

Published in SPIE Proceedings Vol. 6188:
Optical Micro- and Nanometrology in Microsystems Technology
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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