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Proceedings Paper

Thin-film silicon position sensors made using laser scribing
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Paper Abstract

Position detectors are useful for alignment and orientation sensing. Charge-coupled devices (CCDs) are used in small-area systems. Four-quadrant diodes are a low-cost, limited-accuracy alternative. In cases where either large area or reliability under harsh conditions are required, thin-film-silicon sensors may become the only reasonable choice. The paper proposes a simple structure for making such devices, describes the first experiments and discusses the key issues faced, with emphasis on laser scribing.

Paper Details

Date Published: 22 April 2006
PDF: 8 pages
Proc. SPIE 6189, Optical Sensing II, 61890K (22 April 2006); doi: 10.1117/12.662685
Show Author Affiliations
L. Urbina, CIEMAT (Spain)
J. J. Gandía, CIEMAT (Spain)
J. Cárabe, CIEMAT (Spain)
S. Lauzurica, Univ. Politécnica de Madrid (Spain)
C. Molpeceres, Univ. Politécnica de Madrid (Spain)
J. L. Ocaña, Univ. Politécnica de Madrid (Spain)


Published in SPIE Proceedings Vol. 6189:
Optical Sensing II
Brian Culshaw; Anna G. Mignani; Hartmut Bartelt; Leszek R. Jaroszewicz, Editor(s)

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