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Proceedings Paper

Measurements of corner cubes microstructures by high-magnification digital holographic microscopy
Author(s): Jonas Kühn; Etienne Cuche; Yves Emery; Tristan Colomb; Florian Charrière; Frédéric Montfort; Mikhail Botkine; Nicolas Aspert; Christian Depeursinge
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Paper Abstract

This paper presents Digital Holographic Microscopy (DHM) quantitative measurements of transparent high aspect-ratio microstructures. Our experiment was performed using a digital holographic microscope in transmission configuration with a 60x magnification 1.3 NA oil immersion microscope objective, with a diode laser source at 664 nm. We used a calculation model based on the use of two immersion liquids for the experiment, the first one to resolve the phase jumps by using a refractive index liquid close to the sample index, in combination with a second one to retrieve the sample topology from the optical path length information. Such a model makes absolute topographic measurements of high aspect ratio transparent samples achievable by DHM. The model is then applied to measure 25 and 50 m transparent micro-corner cubes arrays, which exhibit up to 1:1,4 aspect ratio with theoretical slopes up to about 55 degrees. Thanks to our phase measurement precision down to 1°, we found possible to measure accurately the slopes of each face of the microstructures under investigation, and this with a good theoretical agreement.

Paper Details

Date Published: 28 April 2006
PDF: 11 pages
Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 618804 (28 April 2006); doi: 10.1117/12.662030
Show Author Affiliations
Jonas Kühn, École Polytechnique Fédérale de Lausanne (Switzerland)
Etienne Cuche, Lyncée Tec SA (Switzerland)
Yves Emery, Lyncée Tec SA (Switzerland)
Tristan Colomb, École Polytechnique Fédérale de Lausanne (Switzerland)
Florian Charrière, École Polytechnique Fédérale de Lausanne (Switzerland)
Frédéric Montfort, Lyncée Tec SA (Switzerland)
Mikhail Botkine, Lyncée Tec SA (Switzerland)
Nicolas Aspert, Lyncée Tec SA (Switzerland)
Christian Depeursinge, École Polytechnique Fédérale de Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 6188:
Optical Micro- and Nanometrology in Microsystems Technology
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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