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Proceedings Paper

Application of a micromachined translatory actuator to an optical FTIR spectrometer
Author(s): Andreas Kenda; Christian Drabe; Harald Schenk; Albert Frank; Martin Lenzhofer; Werner Scherf
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Paper Abstract

We present a Fourier-transform infrared (FTIR) spectrometer where a micro-electro-opto-mechanical system (MOEMS) replaces the macroscopic mirror drive enabling a miniaturized, robust and low cost system. The MOEMS devices are manufactured in a CMOS compatible process on a Silicon on insulator (SOI) substrate. The device consists of a metallized actuator plate with an area of 1.65 mm2 acting as mirror, bearing springs and electrodes for the electrostatic drive. Due to the driving principle based on in-plane electrode combs, 200 μm translatory displacement can be achieved with comparatively low voltages (<40 V) at an ambient pressure below 500 Pa. The actuator operates at a resonant frequency of 5 kHz. Consequently this yields a maximum spectral resolution of 25 cm-1 and an acquisition time of 200 μs per spectrum. Based on a Michelson setup the infrared optical bench of the presented FTIR system is designed to account for the mirror aperture and the desired spectral bandwidth of 2 μm to 5μm. The integrated signal processing electronics has to cope with a bandwidth of 8 MHz as a result of the mirror motion. A digital signal processor manages system control and data processing. Furthermore, high-level analysis algorithms can be applied without the need of an external PC. The high acquisition rate and integration level of the system makes it appropriate for applications like process control and surveillance of fast reactions. First results of transmission and absorbance measurements are shown.

Paper Details

Date Published: 21 April 2006
PDF: 11 pages
Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 618609 (21 April 2006); doi: 10.1117/12.662008
Show Author Affiliations
Andreas Kenda, Carinthian Tech Research AG (Austria)
Christian Drabe, Fraunhofer Institute for Photonic Microsystems (Germany)
Harald Schenk, Fraunhofer Institute for Photonic Microsystems (Germany)
Albert Frank, Carinthian Tech Research AG (Austria)
Martin Lenzhofer, Carinthian Tech Research AG (Austria)
Werner Scherf, Carinthian Tech Research AG (Austria)

Published in SPIE Proceedings Vol. 6186:
MEMS, MOEMS, and Micromachining II
Hakan Ürey; Ayman El-Fatatry, Editor(s)

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