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Proceedings Paper

Management and verification for MEMS fabrication processes
Author(s): T. Schmidt; D. Ortloff; K. Hahn; A. Wagener; J. Popp; R. Brück
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Paper Abstract

In MEMS design many different fabrication techniques and materials are involved and the strong dependency between microstructure and fabrication process leads to application specific fabrication processes. A comprehensive management of process knowledge is required to take into account the various interdependencies and constraints occurring within a MEMS fabrication process. This paper presents an environment for the management of process knowledge and provides support for the design and verification of application specific fabrication processes.

Paper Details

Date Published: 21 April 2006
PDF: 9 pages
Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860S (21 April 2006); doi: 10.1117/12.661919
Show Author Affiliations
T. Schmidt, Univ. of Siegen (Germany)
D. Ortloff, Cavendish Kinetics (Netherlands)
K. Hahn, Univ. of Siegen (Germany)
A. Wagener, Univ. of Siegen (Germany)
J. Popp, Univ. of Siegen (Germany)
R. Brück, Univ. of Siegen (Germany)


Published in SPIE Proceedings Vol. 6186:
MEMS, MOEMS, and Micromachining II
Hakan Ürey; Ayman El-Fatatry, Editor(s)

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