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Proceedings Paper

Development of 3D out-of-plane SU-8 microlenses using modified micromolding in capillaries (MIMIC) technology
Author(s): A. Llobera; R. Wilke; D. W. Johnson; S. Büttgenbach
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Paper Abstract

This paper describes a modification of the standard MIMIC technology, solving its main drawbacks, to define arrays of spherical or ellipsoidal microlenses. Perfectly symmetrical meniscuses have been obtained by using a XP SU-8 NO-2 layer beneath the PDMS mold. Moreover, the photostructurable properties of this polymer allow obtaining self-alignment structures for adequate fiber optics positioning. Microchannels ended with these meniscuses have been filled with standard SU-8 to obtain 3D microlenses. Agreement between theory and experimental results allows confirming the validity of the proposed technology.

Paper Details

Date Published: 21 April 2006
PDF: 8 pages
Proc. SPIE 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration, 618512 (21 April 2006); doi: 10.1117/12.661642
Show Author Affiliations
A. Llobera, Techniche Univ. Braunschweig (Germany)
R. Wilke, Techniche Univ. Braunschweig (Germany)
D. W. Johnson, MicroChem Corp. (United States)
S. Büttgenbach, Techniche Univ. Braunschweig (Germany)


Published in SPIE Proceedings Vol. 6185:
Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration
Hugo Thienpont; Mohammad R. Taghizadeh; Peter Van Daele; Jürgen Mohr, Editor(s)

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