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Proceedings Paper

Optical alignment unit based on shape-memory alloy
Author(s): Igor V. Sevryugin; Vladimir V. Kalinovsky; Igor V. Gostev
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Date Published:
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Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, ; doi: 10.1117/12.661304
Show Author Affiliations
Igor V. Sevryugin, RFNC-VNIIEF (Russia)
Vladimir V. Kalinovsky, RFNC-VNIIEF (Russia)
Igor V. Gostev, RFNC-VNIIEF (Russia)


Published in SPIE Proceedings Vol. 6186:
MEMS, MOEMS, and Micromachining II
Hakan Ürey; Ayman El-Fatatry, Editor(s)

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