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Proceedings Paper

Simulation and fabrication of nitride-based moth-eye light-emitting diodes
Author(s): M. Nakashima; H. Kasugai; A. Deguchi; K. Balakrishnan; M. Iwaya; S. Kamiyama; H. Amano; I. Akasaki
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Paper Abstract

Light extraction efficiency of nitride-based blue-light-emitting diodes on SiC substrate is theoretically investigated using rigorously coupled wave analysis method. Rigidly periodic moth eye structure is found to show superior light extraction efficiency compared with conventional rectangular parallelepiped or pseudo-moth eye structures. High-throughput technology by laser interference lithography for the fabrication of rigidly periodic moth eye structure is established using a 244 nm laser as the light source.

Paper Details

Date Published: 28 February 2006
PDF: 8 pages
Proc. SPIE 6115, Physics and Simulation of Optoelectronic Devices XIV, 61151Y (28 February 2006); doi: 10.1117/12.661181
Show Author Affiliations
M. Nakashima, Meijo Univ. (Japan)
H. Kasugai, Meijo Univ. (Japan)
A. Deguchi, Meijo Univ. (Japan)
K. Balakrishnan, Meijo Univ. (Japan)
M. Iwaya, Meijo Univ. (Japan)
S. Kamiyama, Meijo Univ. (Japan)
H. Amano, Meijo Univ. (Japan)
I. Akasaki, Meijo Univ. (Japan)

Published in SPIE Proceedings Vol. 6115:
Physics and Simulation of Optoelectronic Devices XIV
Marek Osiński; Fritz Henneberger; Yasuhiko Arakawa, Editor(s)

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