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Proceedings Paper

Digital holographic microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS
Author(s): Yves Emery; Etienne Cuche; François Marquet; Nicolas Aspert; Pierre Marquet; Jonas Kühn; Mikhail Botkine; Tristan Colomb; Frédéric Montfort; Florian Charrière; Christian Depeursinge; Patrick Debergh; Ramiro Conde
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Paper Abstract

Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micromirror. This enables the definition of the linear, non-linear, and modal resonance zones of its dynamical response.

Paper Details

Date Published: 21 April 2006
PDF: 5 pages
Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860N (21 April 2006); doi: 10.1117/12.660029
Show Author Affiliations
Yves Emery, Lyncée Tec SA (Switzerland)
Etienne Cuche, Lyncée Tec SA (Switzerland)
François Marquet, Lyncée Tec SA (Switzerland)
Nicolas Aspert, Lyncée Tec SA (Switzerland)
Pierre Marquet, Ctr. de Neurosciences Psychiatriques, CHUV (Switzerland)
Jonas Kühn, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Mikhail Botkine, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Tristan Colomb, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Frédéric Montfort, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Florian Charrière, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Christian Depeursinge, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Patrick Debergh, Colibrys SA (Switzerland)
Ramiro Conde, Colibrys SA (Switzerland)

Published in SPIE Proceedings Vol. 6186:
MEMS, MOEMS, and Micromachining II
Hakan Ürey; Ayman El-Fatatry, Editor(s)

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