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Proceedings Paper

Active focusing device based on MOEMS technology
Author(s): Ulrich Mescheder; Zoltan Torok; Wolfgang Kronast
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Paper Abstract

A MEMS based device for active focus control is presented. The concept has been developed using coupled field FEM simulation. The focus length is adjusted by a reflective membrane which is electro-statically deformed. Using a special ring shaped counter electrode and an optimized weak membrane suspension, a perfect parabolic shape of the deformed membrane is obtained over a very large diameter at reasonable low driving voltages. The counter electrode is part of the chip package which simplifies the fabrication process. Using SOI-technology, the realization of stress free membranes with a diameter up to 10 mm has been proven. The device can be used in active optical applications where large numerical apertures are needed. Potential applications are e.g. confocal microscopy or scanning applications for focus control. In this paper, detailed results of the design optimization process are presented.

Paper Details

Date Published: 21 April 2006
PDF: 12 pages
Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 618601 (21 April 2006); doi: 10.1117/12.659826
Show Author Affiliations
Ulrich Mescheder, Hochschule Furtwangen-Univ. (Germany)
Zoltan Torok, Hochschule Furtwangen-Univ. (Germany)
Wolfgang Kronast, Hochschule Furtwangen-Univ. (Germany)


Published in SPIE Proceedings Vol. 6186:
MEMS, MOEMS, and Micromachining II
Hakan Ürey; Ayman El-Fatatry, Editor(s)

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