Share Email Print
cover

Proceedings Paper

PVPF control of piezoelectric tube scanners
Author(s): B. Bhikkaji; M. Ratnam; S. O. R. Moheimani
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

As in most applications of nanotechnology speed and precision are important requirements for getting good topographical maps of material surfaces using Scanning Tunneling Microscopes (STM) and Atomic Force Microscopes (AFM). Many STMs and AFMs use Piezoelectric tubes for scanning and positioning with nanometer resolution. In this work a piezoelectric tube of the type typically used in STMs and AFMs is considered. Scanning using this piezoelectric tube is hampered by the presence of a low- frequency resonance mode that is easily excited to produce unwanted vibrations. The presence of this low-frequency resonance mode restricts the scanning speed of the piezoelectric tube. Concept of a Positive Velocity and Position Feedback (PVPF) controller is introduced and a controller is designed to dampen the effect of the undesired first resonance mode. To achieve good precision, specific control signals are designed for the closed loop system to track a raster pattern. Experimental results revel a significant damping of the resonance mode of interest, and consequently, a good tracking performance.

Paper Details

Date Published: 15 March 2006
PDF: 11 pages
Proc. SPIE 6169, Smart Structures and Materials 2006: Damping and Isolation, 616901 (15 March 2006); doi: 10.1117/12.659180
Show Author Affiliations
B. Bhikkaji, Univ. of Newcastle (Australia)
M. Ratnam, Univ. of Newcastle (Australia)
S. O. R. Moheimani, Univ. of Newcastle (Australia)


Published in SPIE Proceedings Vol. 6169:
Smart Structures and Materials 2006: Damping and Isolation
William W. Clark; Mehdi Ahmadian; Arnold Lumsdaine, Editor(s)

© SPIE. Terms of Use
Back to Top