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Proceedings Paper

CMOS chip chemical detection system comprising mass-sensitive nanocantilevers
Author(s): Ashok Srivastava; Rajiv Soundararajan; Jui-Ching Hsu
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Paper Abstract

An attempt has been made to design a CMOS single-chip chemical detection system for integrating nanocantilevers with low power readout electronic circuits for the detection of traces (few molecules) of hydrocarbon-based gases in the environment. The design is divided into two following building blocks: nanocantilevers as chemical sensors and readout electronics. Carbon nanotubes (CNT)-based cantilevers have been chosen for high-sensitivity chemical sensing for on-chip integration with the interface electronics. An experimental technique is presented for the fabrication of CNT cantilever beams. Design of a readout interface electronics using a switched capacitor technique is presented in 0.5 μm n-well CMOS process for integrating CNT cantilever sensors.

Paper Details

Date Published: 31 March 2006
PDF: 10 pages
Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 61720Y (31 March 2006); doi: 10.1117/12.659063
Show Author Affiliations
Ashok Srivastava, Louisiana State Univ. (United States)
Rajiv Soundararajan, Louisiana State Univ. (United States)
Jui-Ching Hsu, Louisiana State Univ. (United States)


Published in SPIE Proceedings Vol. 6172:
Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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