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Proceedings Paper

Nanoscale deformation measurements for reliability assessment of material interfaces
Author(s): Jürgen Keller; Astrid Gollhardt; Dietmar Vogel; Bernd Michel
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Paper Abstract

With the development and application of micro/nano electronic mechanical systems (MEMS, NEMS) for a variety of market segments new reliability issues will arise. The understanding of material interfaces is the key for a successful design for reliability of MEMS/NEMS and sensor systems. Furthermore in the field of BIOMEMS newly developed advanced materials and well known engineering materials are combined despite of fully developed reliability concepts for such devices and components. In addition the increasing interface-to volume ratio in highly integrated systems and nanoparticle filled materials are challenges for experimental reliability evaluation. New strategies for reliability assessment on the submicron scale are essential to fulfil the needs of future devices. In this paper a nanoscale resolution experimental method for the measurement of thermo-mechanical deformation at material interfaces is introduced. The determination of displacement fields is based on scanning probe microscopy (SPM) data. In-situ SPM scans of the analyzed object (i.e. material interface) are carried out at different thermo-mechanical load states. The obtained images are compared by grayscale cross correlation algorithms. This allows the tracking of local image patterns of the analyzed surface structure. The measurement results are full-field displacement fields with nanometer resolution. With the obtained data the mixed mode type of loading at material interfaces can be analyzed with highest resolution for future needs in micro system and nanotechnology.

Paper Details

Date Published: 4 April 2006
PDF: 8 pages
Proc. SPIE 6175, Testing, Reliability, and Application of Micro- and Nano-Material Systems IV, 617504 (4 April 2006); doi: 10.1117/12.658637
Show Author Affiliations
Jürgen Keller, Fraunhofer Institute for Reliability and Microintegration (Germany)
Angewandte Micro-Messtechnik GmbH (Germany)
Astrid Gollhardt, Fraunhofer Institute for Reliability and Microintegration (Germany)
Dietmar Vogel, Fraunhofer Institute for Reliability and Microintegration (Germany)
Bernd Michel, Fraunhofer Institute for Reliability and Microintegration (Germany)


Published in SPIE Proceedings Vol. 6175:
Testing, Reliability, and Application of Micro- and Nano-Material Systems IV
Robert E. Geer; Norbert Meyendorf; George Y. Baaklini; Dietmar W. Vogel, Editor(s)

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