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Proceedings Paper

Tiny bimorph mirrors for laser beam control
Author(s): Alexis Kudryashov; Alexander Sobolev; Vadim Samarkin; Tatyana Cherezova
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Paper Abstract

Formation of the given laser beam intensity and phase is an important practical and scientific problem. Semipassive bimorph flexible mirror is one of the most widely used devices for this purpose. We present a novel approach of multilayer bimorph (multimorph) mirrors and a numerical model to simulate them, based on a variation approach of the finite elements method. The multilayer bimorph mirror consists of a substrate and a number of piezoceramic layers. The electrode grid of each layer is determined separately to reproduce low order aberrations.

Paper Details

Date Published: 23 January 2006
PDF: 6 pages
Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130D (23 January 2006); doi: 10.1117/12.658201
Show Author Affiliations
Alexis Kudryashov, Moscow State Open Univ. (Russia)
Alexander Sobolev, Moscow State Open Univ. (Russia)
Vadim Samarkin, Moscow State Open Univ. (Russia)
Tatyana Cherezova, Moscow State Open Univ. (Russia)


Published in SPIE Proceedings Vol. 6113:
MEMS/MOEMS Components and Their Applications III
Scot S. Olivier; Srinivas A. Tadigadapa; Albert K. Henning, Editor(s)

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