Share Email Print
cover

Proceedings Paper

High-performance adaptive optics using microscale assembly
Author(s): Michael Cohn; Kevin Chang; Alexandros Papavasiliou; Scot Oliver; Gina Kim; Gabriel Matus; Zhixiong Xiao; Steven Cheung; KaoSio Saechao; Ryan Roehnelt
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

MicroAssembly Technologies has developed an optical MEMS process based on the batch transfer of microstructures. This "plug and play" process enables integration of ultra-flat SOI reflectors with high-aspect MEMS actuators and high-voltage CMOS driver circuits. Interferometer measurements confirm that assembled mirror devices are extremely flat.

Paper Details

Date Published: 23 January 2006
PDF: 9 pages
Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130M (23 January 2006); doi: 10.1117/12.658058
Show Author Affiliations
Michael Cohn, MicroAssembly Technologies (United States)
Kevin Chang, MicroAssembly Technologies, Inc. (United States)
Alexandros Papavasiliou, Lawrence Livermore National Lab. (United States)
Scot Oliver, Lawrence Livermore National Lab. (United States)
Gina Kim, MicroAssembly Technologies, Inc. (United States)
Gabriel Matus, MicroAssembly Technologies, Inc. (United States)
Zhixiong Xiao, MicroAssembly Technologies, Inc. (United States)
Steven Cheung, MicroAssembly Technologies, Inc. (United States)
KaoSio Saechao, MicroAssembly Technologies, Inc. (United States)
Ryan Roehnelt, MicroAssembly Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 6113:
MEMS/MOEMS Components and Their Applications III
Scot S. Olivier; Srinivas A. Tadigadapa; Albert K. Henning, Editor(s)

© SPIE. Terms of Use
Back to Top