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Proceedings Paper

MEMS deformable mirror embedded wavefront sensing and control system
Author(s): Donald Owens; Michael Schoen; Keith Bush
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Paper Abstract

Electrostatic Membrane Deformable Mirror (MDM) technology developed using silicon bulk micro-machining techniques offers the potential of providing low-cost, compact wavefront control systems for diverse optical system applications. Electrostatic mirror construction using bulk micro-machining allows for custom designs to satisfy wavefront control requirements for most optical systems. An electrostatic MDM consists of a thin membrane, generally with a thin metal or multi-layer high-reflectivity coating, suspended over an actuator pad array that is connected to a high-voltage driver. Voltages applied to the array elements deflect the membrane to provide an optical surface capable of correcting for measured optical aberrations in a given system. Electrostatic membrane DM designs are derived from well-known principles of membrane mechanics and electrostatics, the desired optical wavefront control requirements, and the current limitations of mirror fabrication and actuator drive electronics. MDM performance is strongly dependent on mirror diameter and air damping in meeting desired spatial and temporal frequency requirements. In this paper, we present wavefront control results from an embedded wavefront control system developed around a commercially available high-speed camera and an AgilOptics Unifi MDM driver using USB 2.0 communications and the Linux development environment. This new product, ClariFastTM, combines our previous ClarifiTM product offering into a faster more streamlined version dedicated strictly to Hartmann Wavefront sensing.

Paper Details

Date Published: 23 January 2006
PDF: 12 pages
Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130V (23 January 2006); doi: 10.1117/12.658037
Show Author Affiliations
Donald Owens, AgilOptics, Inc. (United States)
Michael Schoen, AgilOptics, Inc. (United States)
Keith Bush, AgilOptics, Inc. (United States)


Published in SPIE Proceedings Vol. 6113:
MEMS/MOEMS Components and Their Applications III
Scot S. Olivier; Srinivas A. Tadigadapa; Albert K. Henning, Editor(s)

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