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Proceedings Paper

Improvement of the elastic modulus of micromachined structures using carbon nanotubes
Author(s): Prasoon Joshi; Abhijat Goyal; Awnish Gupta; Srinivas Tadigadapa; Peter C. Eklund
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Paper Abstract

It has been shown that the addition of single walled carbon anotubes (SWNTs) cause an increase in the resonance frequency of micromachined clamped-clamped structures. This is believed to be due to an increase in the effective stiffness of the micromachined structures due to the high Young's modulus of carbon nanotubes. These results were obtained in spite of a relatively poor control over the orientation and aerial density of the deposited SWNTs. Finite element simulations showed an increase in the resonance frequency of up to ~25% for the simulated devices. This increase in the resonance frequency of the bridges can be attributed to the high Young's modulus (~1TPa) of the carbon nanotubes.

Paper Details

Date Published: 6 January 2006
PDF: 8 pages
Proc. SPIE 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, 611107 (6 January 2006); doi: 10.1117/12.657674
Show Author Affiliations
Prasoon Joshi, The Pennsylvania State Univ. (United States)
Abhijat Goyal, The Pennsylvania State Univ. (United States)
Awnish Gupta, The Pennsylvania State Univ. (United States)
Srinivas Tadigadapa, The Pennsylvania State Univ. (United States)
Peter C. Eklund, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 6111:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
Danelle M. Tanner; Rajeshuni Ramesham, Editor(s)

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