Share Email Print
cover

Proceedings Paper

Characterization of interaction between water and photoresist material
Author(s): Jean-Louis P. Stehle; Jean-Philippe Piel; Dorian Zahorski
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
PDF
Proc. SPIE 6153, Advances in Resist Technology and Processing XXIII, 615323; doi: 10.1117/12.657534
Show Author Affiliations
Jean-Louis P. Stehle, SOPRA SA (France)
Jean-Philippe Piel, SOPRA SA (France)
Dorian Zahorski, SOPRA SA (France)


Published in SPIE Proceedings Vol. 6153:
Advances in Resist Technology and Processing XXIII
Qinghuang Lin, Editor(s)

© SPIE. Terms of Use
Back to Top