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Proceedings Paper

Advanced photoresist dispense valve control technology
Author(s): Garrett Standley; Brian Kidd; Kevin Hartman
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Paper Abstract

Resist minimization techniques have been around since the mid-1990s. As the volume decreases, the accuracy of the systems must increase. These inaccuracies can negate any savings that could potentially be acquired due to rework or even scrap. This has become a problem for older factories with pumps that are not accurate below 2.0ml. In order to help with these issues, Integrated Designs has created the digital dispense valve. This mechanical addition can prolong the life of a pump and saving the costly pump replacement scenario. The digital dispense valve increases the accuracy at lower dispense volumes and give more repeatable suckback control than was previously available for this generation of pump systems.

Paper Details

Date Published: 29 March 2006
PDF: 11 pages
Proc. SPIE 6153, Advances in Resist Technology and Processing XXIII, 61534O (29 March 2006); doi: 10.1117/12.656628
Show Author Affiliations
Garrett Standley, Freescale Semiconductor, Inc. (United States)
Brian Kidd, Integrated Designs, Inc. (United States)
Kevin Hartman, Integrated Designs, Inc. (United States)

Published in SPIE Proceedings Vol. 6153:
Advances in Resist Technology and Processing XXIII
Qinghuang Lin, Editor(s)

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