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Proceedings Paper

Two-layer anti-reflection strategies for implant applications
Author(s): Douglas J. Guerrero; Tamara Smith; Masakazu Kato; Shigeo Kimura; Tomoyuki Enomoto
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Paper Abstract

A two-layer bottom anti-reflective coating (BARC) concept in which a layer that develops slowly is coated on top of a bottom layer that develops more rapidly was demonstrated. Development rate control was achieved by selection of crosslinker amount and BARC curing conditions. A single-layer BARC was compared with the two-layer BARC concept. The single-layer BARC does not clear out of 200-nm deep vias. When the slower developing single-layer BARC was coated on top of the faster developing layer, the vias were cleared. Lithographic evaluation of the two-layer BARC concept shows the same resolution advantages as the single-layer system. Planarization properties of a two-layer BARC system are better than for a single-layer system, when comparing the same total nominal thicknesses.

Paper Details

Date Published: 11 April 2006
PDF: 8 pages
Proc. SPIE 6153, Advances in Resist Technology and Processing XXIII, 61530O (11 April 2006); doi: 10.1117/12.656528
Show Author Affiliations
Douglas J. Guerrero, Brewer Science, Inc. (United States)
Tamara Smith, Brewer Science, Inc. (United States)
Masakazu Kato, Nissan Chemical Industries, Ltd. (Japan)
Shigeo Kimura, Nissan Chemical Industries, Ltd. (Japan)
Tomoyuki Enomoto, Nissan Chemical Industries, Ltd. (Japan)

Published in SPIE Proceedings Vol. 6153:
Advances in Resist Technology and Processing XXIII
Qinghuang Lin, Editor(s)

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