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Proceedings Paper

Large-stroke self-aligned vertical comb drive actuators for adaptive optics applications
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Paper Abstract

A high-stroke micro-actuator array was designed, modeled, fabricated and tested. Each pixel in the 4x4 array consists of a self-aligned vertical comb drive actuator. This micro-actuator array was designed to become the foundation of a micro-mirror array that will be used as a deformable mirror for adaptive optics applications. Analytical models combined with CoventorWare(R) simulations were used to design actuators that would move up to 10 microns in piston motion with 100V applied. Devices were fabricated according to this design and testing of these devices demonstrated an actuator displacement of 1.4 microns with 200V applied. Further investigation revealed that fabrication process inaccuracy led to significantly stiffer mechanical springs in the fabricated devices. The increased stiffness of the springs was shown to account for the reduced displacement of the actuators relative to the design.

Paper Details

Date Published: 23 January 2006
PDF: 9 pages
Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130T (23 January 2006); doi: 10.1117/12.656508
Show Author Affiliations
Emily Carr, Univ. of California/Davis (United States)
Lawrence Livermore National Lab. (United States)
Scot Olivier, Lawrence Livermore National Lab. (United States)
Olav Solgaard, Stanford Univ., EL Ginzton Lab. (United States)

Published in SPIE Proceedings Vol. 6113:
MEMS/MOEMS Components and Their Applications III
Scot S. Olivier; Srinivas A. Tadigadapa; Albert K. Henning, Editor(s)

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