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Proceedings Paper

Absolute measurement of rotationally symmetrical aspheric surfaces
Author(s): Michael F. Kuechel; Ryuichi Sato
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Proc. SPIE 6154, Optical Microlithography XIX, ; doi: 10.1117/12.655598
Show Author Affiliations
Michael F. Kuechel, Zygo Corp. (Germany)
Ryuichi Sato, Canon Inc. (Japan)


Published in SPIE Proceedings Vol. 6154:
Optical Microlithography XIX
Donis G. Flagello, Editor(s)

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