Share Email Print
cover

Proceedings Paper

Metrology tool fleet management: applying FMP tool matching and monitoring concepts to an overlay fleet
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Overlay tool matching and accuracy issues are quickly reaching a comparable complexity to that of critical dimensional metrology. While both issues warrant serious investigation, this paper deals with the matching issues associated with overlay tools. Overlay tools need to run and measure as if they are a single tool - they need to act as one. In this paper a matching methodology is used to assess a set of overlay tools in a multiple of overlay applications. The methodology proposed in a prior2 SPIE paper is applied here to a fleet of two generations of overlay tools to detect measurement problems not seen with convention Statistical Process Control techniques. Four studies were used to examine the benefits of this matching methodology for this fleet of overlay tools. The first study was a matching assessment study. The second study was a hardware comparison between generations of tools. The third study was a measurement strategy comparison. The final study was a long term matching exercise where one example of a traditional long term monitoring strategy was compared to a new long term monitoring strategy. It is shown that this new tool matching method can be effectively applied to overlay metrology.

Paper Details

Date Published: 24 March 2006
PDF: 11 pages
Proc. SPIE 6152, Metrology, Inspection, and Process Control for Microlithography XX, 615212 (24 March 2006); doi: 10.1117/12.655578
Show Author Affiliations
Jennifer Morningstar, IBM Systems and Technology Group (United States)
Eric Solecky, IBM Systems and Technology Group (United States)
Chas Archie, IBM Systems and Technology Group (United States)
Bill Banke, IBM Systems and Technology Group (United States)


Published in SPIE Proceedings Vol. 6152:
Metrology, Inspection, and Process Control for Microlithography XX
Chas N. Archie, Editor(s)

© SPIE. Terms of Use
Back to Top