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Proceedings Paper

Trap mechanism of micro bubble in micro concave patterns
Author(s): Akira Kawai; Tomotaka Ariga; Simpei Hori; Masahiko Harumoto; Osamu Tamada; Masakazu Sanada
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Paper Abstract

The micro bubbles condense in the concave channel and are trapped at the channel corner. In the experiments, the deionized (DI) water is dropped on a dry film resist (DFR) pattern. In the result, the micro bubble condensed and trapped at the different position in various shape patterns. The removal of micro bubbles adhered on a resist pattern has been recognized as one important factor in micro device manufacturing. We explained the condensation behavior of the micro bubble based on thermodynamics. The force acting on the bubble is estimated based on the force balance model between buoyancy and line tension. We can control and predict the micro bubble condensation by designing micro pattern arrangement.

Paper Details

Date Published: 29 March 2006
PDF: 8 pages
Proc. SPIE 6153, Advances in Resist Technology and Processing XXIII, 61531T (29 March 2006); doi: 10.1117/12.655447
Show Author Affiliations
Akira Kawai, Nagaoka Univ. of Technology (Japan)
Tomotaka Ariga, Nagaoka Univ. of Technology (Japan)
Simpei Hori, Dainippon Screen Manufacturing Co., Ltd. (Japan)
Masahiko Harumoto, Dainippon Screen Manufacturing Co., Ltd. (Japan)
Osamu Tamada, Dainippon Screen Manufacturing Co., Ltd. (Japan)
Masakazu Sanada, Dainippon Screen Manufacturing Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 6153:
Advances in Resist Technology and Processing XXIII
Qinghuang Lin, Editor(s)

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