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Proceedings Paper

Generation of new nanomaterials by interfering femtosecond laser processing and its applications
Author(s): Yoshiki Nakata
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Paper Abstract

New nanomaterials such as nanobump, nanomesh, nanobelt were generated by thin film processing by interfering femtosecond laser beams. To split and correlate femtosecond laser, a demagnification optical system with a transmission beam splitter was used. Different interference patterns can be generated depending upon the number of beam, magnification factor and period of the transmission grating. Using the system, a material surface can be processed according to the interference pattern. Metallic single- or multi-layered film was used as a target. A nanobump array was applied to field emission device. In addition, periodic structure could be generated inside transparent material in a single process. This scheme is a new technique to generate new nanomaterials and nanostructures using top-down technique.

Paper Details

Date Published: 1 March 2006
PDF: 10 pages
Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61060M (1 March 2006); doi: 10.1117/12.655159
Show Author Affiliations
Yoshiki Nakata, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 6106:
Photon Processing in Microelectronics and Photonics V
David B. Geohegan; Tatsuo Okada; Craig B. Arnold; Frank Träger; Jan J. Dubowski; Michel Meunier; Andrew S. Holmes, Editor(s)

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