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Proceedings Paper

Surface microfabrication of silica glass by LIBWE using DPSS-UV laser
Author(s): H. Niino; Y. Kawaguchi; T. Sato; A. Narazaki; R. Kurosaki
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Paper Abstract

Surface micro-structuring of silica glass plates was performed by using laser-induced backside wet etching (LIBWE) upon irradiation with a single-mode laser beam from a diode-pumped solid-state UV laser at 266 nm. We have succeeded in a well-defined micro-pattern formation without debris and microcrack formations around the etched area on the basis of galvanometer-based point scanning system with the laser beam. The behavior of liquid ablation (explosive vaporization) was monitored by impulse pressure detection with a fast-response piezoelectric pressure gauge. LIBWE method is suitable for rapid prototyping and rapid manufacturing of surface microstructuing of silica glass as mask-less exposure system in a conventional atmospheric environment.

Paper Details

Date Published: 1 March 2006
PDF: 9 pages
Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61061E (1 March 2006); doi: 10.1117/12.654724
Show Author Affiliations
H. Niino, National Institute of Advanced Industrial Science and Technology (Japan)
Y. Kawaguchi, National Institute of Advanced Industrial Science and Technology (Japan)
T. Sato, National Institute of Advanced Industrial Science and Technology (Japan)
A. Narazaki, National Institute of Advanced Industrial Science and Technology (Japan)
R. Kurosaki, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6106:
Photon Processing in Microelectronics and Photonics V
David B. Geohegan; Tatsuo Okada; Craig B. Arnold; Frank Träger; Jan J. Dubowski; Michel Meunier; Andrew S. Holmes, Editor(s)

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