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Proceedings Paper

Optical MEMS and polymers: an overview (Invited Paper)
Author(s): P. R. Patterson
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Paper Abstract

Polymer materials offer unique properties for fabrication of micro-optical systems. The ability to engineer the optical and mechanical properties of polymers, the low cost of polymers, and the wide choice of fabrication methods make polymers particularly attractive for low cost, and potential mass production of micro-optical elements and integrated micro-optical systems. An overview of the current state of the art in polymer micro-optic fabrication technology and applications to optical MEMS is presented.

Paper Details

Date Published: 6 December 2005
PDF: 5 pages
Proc. SPIE 6050, Optomechatronic Micro/Nano Devices and Components, 60500P (6 December 2005); doi: 10.1117/12.654007
Show Author Affiliations
P. R. Patterson, HRL Labs., LLC (United States)


Published in SPIE Proceedings Vol. 6050:
Optomechatronic Micro/Nano Devices and Components
Yoshitada Katagiri, Editor(s)

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