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Proceedings Paper

MEMS analog light processing: an enabling technology for adaptive optical phase control
Author(s): Andreas Gehner; Michael Wildenhain; Hannes Neumann; Jens Knobbe; Ondrej Komenda
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Paper Abstract

Various applications in modern optics are demanding for Spatial Light Modulators (SLM) with a true analog light processing capability, e.g. the generation of arbitrary analog phase patterns for an adaptive optical phase control. For that purpose the Fraunhofer IPMS has developed a high-resolution MEMS Micro Mirror Array (MMA) with an integrated active-matrix CMOS address circuitry. The device provides 240 x 200 piston-type mirror elements with 40 μm pixel size, where each of them can be addressed and deflected independently at an 8bit height resolution with a vertical analog deflection range of up to 400 nm suitable for a 2pi phase modulation in the visible. Full user programmability and control is provided by a newly developed comfortable driver software for Windows XP based PCs supporting both a Graphical User Interface (GUI) for stand-alone operation with pre-defined data patterns as well as an open ActiveX programming interface for a direct data feed-through within a closed-loop environment. High-speed data communication is established by an IEEE1394a FireWire interface together with an electronic driving board performing the actual MMA programming and control at a maximum frame rate of up to 500 Hz. Successful application demonstrations have been given in eye aberration correction, coupling efficiency optimization into a monomode fiber, ultra-short laser pulse modulation and diffractive beam shaping. Besides a presentation of the basic device concept the paper will give an overview of the obtained results from these applications.

Paper Details

Date Published: 23 January 2006
PDF: 15 pages
Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130K (23 January 2006); doi: 10.1117/12.651731
Show Author Affiliations
Andreas Gehner, Fraunhofer Institute for Photonics Microsystems (Germany)
Michael Wildenhain, Fraunhofer Institute for Photonics Microsystems (Germany)
Hannes Neumann, Fraunhofer Institute for Photonics Microsystems (Germany)
Jens Knobbe, Fraunhofer Institute for Photonics Microsystems (Germany)
Ondrej Komenda, Czech Technical Univ. (Czech Republic)


Published in SPIE Proceedings Vol. 6113:
MEMS/MOEMS Components and Their Applications III
Scot S. Olivier; Srinivas A. Tadigadapa; Albert K. Henning, Editor(s)

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