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Proceedings Paper

Laser nanoprocessing using near-field probes
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Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61060J; doi: 10.1117/12.651063
Show Author Affiliations
Costas P. Grigoropoulos, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 6106:
Photon Processing in Microelectronics and Photonics V
David B. Geohegan; Frank Träger; Jan J. Dubowski; Tatsuo Okada; Craig B. Arnold; Michel Meunier; Andrew S. Holmes, Editor(s)

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