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Proceedings Paper

Fabrication and test of an electrochemical microactutor
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Paper Abstract

This paper reports on the design, fabrication, and analysis of an electrochemical (ECM) microactuator. The driving mechanism of the ECM actuator is based on the reversible electrolysis process of water. The expansion and reduction of gas bubbles generated in a micro electrochemical chamber during a reversible electrolysis process can be used to provide a pressure difference in microlfuidic systems. The ECM actuator has a very simple design consisting of inlet/outlet channels, reservoirs, and electrochemical reaction chamber. The fluidic components of the ECM actuator were fabricated on a glass substrate using UV lithography of SU-8 using both Pt black and Ag/AgCl electrodes. The Pt black and Ag/AgCl coated electrodes were supplied with controlled electropotentials for active control of expansion and shrinkage of gas bubbles using reproducible electrochemical reactions. The theoretical volume change rate of gas bubbles was simulated as a function of time using the ideal gas law and compared with the measured volume change. The results show that the simulation can be used to predict trends of the volume change by the electrochemical reactions and also, the device can serve as a promising microactuator for microfluidic applications.

Paper Details

Date Published: 23 January 2006
PDF: 10 pages
Proc. SPIE 6112, Microfluidics, BioMEMS, and Medical Microsystems IV, 61120N (23 January 2006); doi: 10.1117/12.650850
Show Author Affiliations
Dong Eun Lee, Louisiana State Univ. (United States)
Steven A. Soper, Louisiana State Univ. (United States)
Wanjun Wang, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 6112:
Microfluidics, BioMEMS, and Medical Microsystems IV
Ian Papautsky; Wanjun Wang, Editor(s)

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