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Proceedings Paper

High g testing of MEMS devices
Author(s): Robert P. O'Reilly
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Paper Abstract

Replicating the mechanical environments to which MEMS devices (Micro- Electro-Mechanical Systems) are exposed requires extreme test strategies. Acceleration levels in the 10's of thousands of g's is a normal occurrence in today's MEMS applications. Traditional test methods in use for over a half century are no longer adequate. New test methods are constantly required to meet the demanding quality and reliability levels of everything from emerging consumer applications to safety critical military and automotive systems.

Paper Details

Date Published: 6 January 2006
PDF: 7 pages
Proc. SPIE 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, 61110I (6 January 2006); doi: 10.1117/12.650722
Show Author Affiliations
Robert P. O'Reilly, Analog Devices Inc. (United States)


Published in SPIE Proceedings Vol. 6111:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
Danelle M. Tanner; Rajeshuni Ramesham, Editor(s)

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