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Proceedings Paper

A new direct detection camera system for electron microscopy
Author(s): Shengdong Li; James Bouwer; Fred Duttweiler; Mark Ellisman; Liang Jin; Phillip Leblanc; Anna Milazzo; Steve Peltier; Nguyen Xuong; Stuart Kleinfelder
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Paper Abstract

High resolution electron imaging is very important in nanotechnology and biotechnology fields. For example, Cryogenic Electron-Microscopy is a promising method to obtain 3-D structures of large protein complexes and viruses. We report on the design and measurements of a new CMOS direct-detection camera system for electron imaging. The active pixel sensor array that we report on includes 512 by 550 pixels, each 5 by 5 μm in size, with an ~8 μm epitaxial layer to achieve an effective fill factor of 100%. Spatial resolution of 2.3 μm for a single incident e- has been measured. Electron microscope tests have been performed with 200 and 300 keV beams, and the first recorded Electron Microscope image is presented.

Paper Details

Date Published: 6 February 2006
PDF: 10 pages
Proc. SPIE 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII, 60680O (6 February 2006); doi: 10.1117/12.650673
Show Author Affiliations
Shengdong Li, Univ. of California, Irvine (United States)
James Bouwer, Univ. of California, San Diego (United States)
Fred Duttweiler, Univ. of California, San Diego (United States)
Mark Ellisman, Univ. of California, San Diego (United States)
Liang Jin, Univ. of California, San Diego (United States)
Phillip Leblanc, Univ. of California, San Diego (United States)
Anna Milazzo, Univ. of California, San Diego (United States)
Steve Peltier, Univ. of California, San Diego (United States)
Nguyen Xuong, Univ. of California, San Diego (United States)
Stuart Kleinfelder, Univ. of California, Irvine (United States)


Published in SPIE Proceedings Vol. 6068:
Sensors, Cameras, and Systems for Scientific/Industrial Applications VII
Morley M. Blouke, Editor(s)

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