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Proceedings Paper

Method for testing small light spot produced by optical systems of high NA
Author(s): Fei Zhou; Wendong Xu; Fuxi Gan
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Paper Abstract

We report a method for testing small light spot produced by an optical system with high numerical-aperture (NA). A high NA objective was used to converge the incident linear polarized light, and a tapered optical fiber probe with an opening of 50-80 nm mounted in the near-field optical microscopy (SNOM) apparatus was used to measure light intensity. The small light spot can be measured with high spatial resolution. The results show that a resolution of 50~100 nm can be obtained.

Paper Details

Date Published: 15 September 2005
PDF: 4 pages
Proc. SPIE 5966, Seventh International Symposium on Optical Storage (ISOS 2005), 596628 (15 September 2005); doi: 10.1117/12.649829
Show Author Affiliations
Fei Zhou, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science (China)
Wendong Xu, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science (China)
Fuxi Gan, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science (China)


Published in SPIE Proceedings Vol. 5966:
Seventh International Symposium on Optical Storage (ISOS 2005)
Fuxi Gan; Lisong Hou, Editor(s)

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