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Proceedings Paper

Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror
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Paper Abstract

We have demonstrated that a microelectrical mechanical systems (MEMS) deformable mirror can be flattened to < 1 nm RMS within controllable spatial frequencies over a 9.2-mm aperture making it a viable option for high-contrast adaptive optics systems (also known as Extreme Adaptive Optics). The Extreme Adaptive Optics Testbed at UC Santa Cruz is being used to investigate and develop technologies for high-contrast imaging, especially wavefront control. A phase shifting diffraction interferometer (PSDI) measures wavefront errors with sub-nm precision and accuracy for metrology and wavefront control. Consistent flattening, required testing and characterization of the individual actuator response, including the effects of dead and low-response actuators. Stability and repeatability of the MEMS devices was also tested. An error budget for MEMS closed loop performance will summarize MEMS characterization.

Paper Details

Date Published: 23 January 2006
PDF: 6 pages
Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130I (23 January 2006); doi: 10.1117/12.648977
Show Author Affiliations
Julia W. Evans, Lawrence Livermore National Lab. (United States)
Univ. of California/Davis (United States)
Katie Morzinski, Univ. of California/Santa Cruz (United States)
Scott Severson, Univ. of California/Santa Cruz (United States)
Lisa Poyneer, Lawrence Livermore National Lab. (United States)
Bruce Macintosh, Lawrence Livermore National Lab. (United States)
Univ. of California/Santa Cruz (United States)
Daren Dillon, Univ. of California/Santa Cruz (United States)
Layra Reza, Univ. of California/Santa Cruz (United States)
Univ. of Texas/El Paso (United States)
Donald Gavel, Univ. of California/Santa Cruz (United States)
David Palmer, Lawrence Livermore National Lab. (United States)
Scot Olivier, Lawrence Livermore National Lab. (United States)
Paul Bierden, Boston Micromachines Corp. (United States)


Published in SPIE Proceedings Vol. 6113:
MEMS/MOEMS Components and Their Applications III
Scot S. Olivier; Srinivas A. Tadigadapa; Albert K. Henning, Editor(s)

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