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Proceedings Paper

Fabry-Perot optical modulator fabricated by aerosol deposition
Author(s): Masafumi Nakada; Keishi Ohashi; Hiroki Tsuda; Jun Akedo
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Paper Abstract

We developed a Fabry-Perot (FP) optical modulator with electro-optic (EO) films fabricated by aerosol deposition (AD). We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. Since thick EO films greater than 5 μm can be deposited on a transparent electrode layer or a metallic mirror layer of the FP optical modulator by AD, the FP optical modulator can achieve low capacitance, resulting in high modulation speed. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3. We obtained a 4-dB modulation with 50 V for the 10-μm-thick modulator with dielectric multilayer mirror on a glass substrate.

Paper Details

Date Published: 5 December 2005
PDF: 8 pages
Proc. SPIE 6050, Optomechatronic Micro/Nano Devices and Components, 605004 (5 December 2005); doi: 10.1117/12.648338
Show Author Affiliations
Masafumi Nakada, NEC Corp. (Japan)
Keishi Ohashi, NEC Corp. (Japan)
Hiroki Tsuda, National Institutes of Advanced Industrial Science and Technology (Japan)
Jun Akedo, National Institutes of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6050:
Optomechatronic Micro/Nano Devices and Components
Yoshitada Katagiri, Editor(s)

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