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Proceedings Paper

Performance of a high-stroke segmented MEMS deformable-mirror technology
Author(s): Michael A. Helmbrecht; Thor Juneau; Matthew Hart; Nathan Doble
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Paper Abstract

This paper presents a MEMS DM that is a hybrid of surface micromachining and bulk micromachining. The combination of fabrication techniques resulted in a DM that has demonstrated 7.6 μm stroke at 125 V, 98.6% fill factor, and excellent optical quality of better than 16 nm rms after packaging. Preliminary cyclic testing over 110 hours and 107 cycles showed no noticeable changes to the actuator positions after cycling.

Paper Details

Date Published: 23 January 2006
PDF: 10 pages
Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130L (23 January 2006); doi: 10.1117/12.647884
Show Author Affiliations
Michael A. Helmbrecht, Iris AO, Inc. (United States)
Thor Juneau, Iris AO, Inc. (United States)
Matthew Hart, Iris AO, Inc. (United States)
Nathan Doble, Iris AO, Inc. (United States)


Published in SPIE Proceedings Vol. 6113:
MEMS/MOEMS Components and Their Applications III
Scot S. Olivier; Srinivas A. Tadigadapa; Albert K. Henning, Editor(s)

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