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Proceedings Paper

Fabrication of multilayer passive electric components using inkjet printing and low temperature laser processing on polymer
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Paper Abstract

The low temperature fabrication of passive electrical components (conductor, capacitor) on the flexible polymer substrate is presented in this paper. A drop-on-demand (DOD) ink-jetting system was used to print gold nano-particles suspended in Alpha-Terpineol solvent and PVP in PGMEA solvent to fabricate passive electrical components on flexible polymer substrate. Short pulsed laser ablation enabled finer electrical components to overcome limitation of inkjet process. Continuous Argon ion laser was irradiated locally to evaporate carrier solvent as well as to sinter gold nano-particles. In addition, a self alignment technique for PVP layer was demonstrated taking advantage of the deliberate modification of surface wetting characteristics. Finally, a new selective ablation of multilayered gold nanoparticle film was demonstrated using the ablation threshold difference for sintered and non sintered gold nanoparticles.

Paper Details

Date Published: 1 March 2006
PDF: 9 pages
Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61060E (1 March 2006); doi: 10.1117/12.647872
Show Author Affiliations
Seung Hwan Ko, Univ. of California, Berkeley (United States)
Jaewon Chung, Korea Univ. (South Korea)
Heng Pan, Univ. of California, Berkeley (United States)
Costas P. Grigoropoulos, Univ. of California, Berkeley (United States)
Dimos Poulikakos, ETH Zürich (Switzerland)

Published in SPIE Proceedings Vol. 6106:
Photon Processing in Microelectronics and Photonics V
David B. Geohegan; Tatsuo Okada; Craig B. Arnold; Frank Träger; Jan J. Dubowski; Michel Meunier; Andrew S. Holmes, Editor(s)

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