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Proceedings Paper

Using periodic electrical excitation to achieve stick-release in micro-cantilevers
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Paper Abstract

Recently, it has been proposed that sticking contact between micro-scale components may be relieved (i.e., the components may be unstuck) using structural vibrations. The means to excite these vibrations plays a critical role in the physical mechanism responsible for the initiation of stick-release. For example, it has been shown that mechanical actuation using, say, an instrumented nanoindentor is most effective near a resonant frequency. Aside from showing the fundamental mechanism responsible for the repair (resonance), it also provides insight for choosing optimal excitation parameters, such as excitation amplitude and frequency, for stick-release. In the present paper, periodic electrical excitation is explored as a means of inducing structural vibrations. It is shown that electrical excitation produces stick-release through a fundamentally different mechanism than its mechanical counterpart. Here, stick-release is achieved via unstable self-excited vibrations. This fact has a significant influence on the practical matter of choosing appropriate excitation parameters to produce the desired repair. Using the underlying physics, appropriate parameter combinations are mapped.

Paper Details

Date Published: 5 January 2006
PDF: 8 pages
Proc. SPIE 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, 611102 (5 January 2006); doi: 10.1117/12.647841
Show Author Affiliations
Amit Savkar, Univ. of Connecticut (United States)
Kevin D. Murphy, Univ. of Connecticut (United States)

Published in SPIE Proceedings Vol. 6111:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
Danelle M. Tanner; Rajeshuni Ramesham, Editor(s)

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