Share Email Print
cover

Proceedings Paper

Using periodic electrical excitation to achieve stick-release in micro-cantilevers
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Recently, it has been proposed that sticking contact between micro-scale components may be relieved (i.e., the components may be unstuck) using structural vibrations. The means to excite these vibrations plays a critical role in the physical mechanism responsible for the initiation of stick-release. For example, it has been shown that mechanical actuation using, say, an instrumented nanoindentor is most effective near a resonant frequency. Aside from showing the fundamental mechanism responsible for the repair (resonance), it also provides insight for choosing optimal excitation parameters, such as excitation amplitude and frequency, for stick-release. In the present paper, periodic electrical excitation is explored as a means of inducing structural vibrations. It is shown that electrical excitation produces stick-release through a fundamentally different mechanism than its mechanical counterpart. Here, stick-release is achieved via unstable self-excited vibrations. This fact has a significant influence on the practical matter of choosing appropriate excitation parameters to produce the desired repair. Using the underlying physics, appropriate parameter combinations are mapped.

Paper Details

Date Published: 5 January 2006
PDF: 8 pages
Proc. SPIE 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, 611102 (5 January 2006); doi: 10.1117/12.647841
Show Author Affiliations
Amit Savkar, Univ. of Connecticut (United States)
Kevin D. Murphy, Univ. of Connecticut (United States)


Published in SPIE Proceedings Vol. 6111:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
Danelle M. Tanner; Rajeshuni Ramesham, Editor(s)

© SPIE. Terms of Use
Back to Top