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Proceedings Paper

Polymer-based micro-deformable mirror for adaptive optics
Author(s): Arnaud Liotard; Frederic Zamkotsian; Veronique Conedera; Norbert Fabre; Patrick Lanzoni; Henri Camon; Frederic Chazallet
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Paper Abstract

Highly performing adaptive optical (AO) systems are mandatory for next generation giant telescopes as well as next generation instrumentation for 10m-class telescopes, for studying new fields like circumstellar disks and extra-solar planets. These systems require deformable mirrors with very challenging parameters, including number of actuators up to 250 000 and inter-actuator spacing around 500μm. MOEMS-based devices are promising for future deformable mirrors. We are currently developing a micro-deformable mirror (MDM) based on an array of electrostatic actuators with attachment posts to a continuous mirror on top. In order to reach large stroke for low driving voltage, the originality of our approach lies in the elaboration of a sacrificial layer and of a structural layer made of polymer materials. We have developed the first polymer piston-motion actuator: a 10μm thick mobile plate with four springs attached to the substrate, and with an air gap of 10μm exhibits a piston motion of 2μm for 30V, and measured resonance frequency of 6.5kHz is well suited for AO systems. The electrostatic force provides a non-linear actuation, while AO systems are based on linear matrices operations. We have successfully developed a dedicated 14-bit electronics in order to "linearize" the actuation. Actual location of the actuator versus expected location of the actuator is obtained with a standard deviation of 21 nm. Comparison with FEM models shows very good agreement, and design of a complete polymer-based MDM has been done.

Paper Details

Date Published: 23 January 2006
PDF: 12 pages
Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130R (23 January 2006); doi: 10.1117/12.647833
Show Author Affiliations
Arnaud Liotard, Lab. d'Astrophysique de Marseille (France)
Frederic Zamkotsian, Lab. d'Astrophysique de Marseille (France)
Veronique Conedera, Lab. d'Analyse et d'Architecture des Systemes (France)
Norbert Fabre, Lab. d'Analyse et d'Architecture des Systemes (France)
Patrick Lanzoni, Lab. d'Astrophysique de Marseille (France)
Henri Camon, Lab. d'Analyse et d'Architecture des Systemes (France)
Frederic Chazallet, Shaktiware (France)

Published in SPIE Proceedings Vol. 6113:
MEMS/MOEMS Components and Their Applications III
Scot S. Olivier; Srinivas A. Tadigadapa; Albert K. Henning, Editor(s)

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