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Proceedings Paper

Effect of two- and three-zone phase masks on the axial and transverse intensity distribution under high numerical aperture focusing
Author(s): Stephen M. Kuebler; Toufic Jabbour
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Paper Abstract

Vector diffraction theory was applied to study computationally the effect of two and three-zone annular multi-phase plates (AMPs) on the three-dimensional point-spread-function (PSF). The two- and four-dimensional solutions spaces associated with a two- and three-zone AMP, respectively, were discretized and the PSF was calculated using the Wolf diffraction integrals for each unique combination of zone radius and relative phase. Conditions are identified in which a three-zone AMP generates an intensity distribution that is super-resolved by 19% in the axial direction with minimal change in the transverse distribution and sufficiently small axial side-lobes that this intensity pattern could be used for advanced photolithographic techniques, such as multi-photon three-dimensional microfabrication.

Paper Details

Date Published: 23 January 2006
PDF: 6 pages
Proc. SPIE 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV, 61100B (23 January 2006); doi: 10.1117/12.647618
Show Author Affiliations
Stephen M. Kuebler, College of Optics and Photonics, CREOL, Univ. of Central Florida (United States)
Univ. of Central Florida (United States)
Toufic Jabbour, College of Optics and Photonics, CREOL, Univ. of Central Florida (United States)


Published in SPIE Proceedings Vol. 6110:
Micromachining Technology for Micro-Optics and Nano-Optics IV
Eric G. Johnson; Gregory P. Nordin; Thomas J. Suleski, Editor(s)

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