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Proceedings Paper

Electrostatically tunable infrared filter that uses etched thin Si plates
Author(s): Itsunari Yamada; Kazuya Kimura; Yutaka Yamagishi; Mitsunori Saito
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Paper Abstract

We fabricated infrared Fabry-Perot filters by stacking two wet-etched Si plates. When an electric voltage was applied between the plates, the spacing between the plates changed due to an electrostatic force, which caused a shift of interference peaks. The Si plates were etched in a KOH solution to 34-μm thickness in order to reduce the driving voltage. When the voltage was raised from 0 to 20 V, an interference peak shifted from 7.9- to 5.5-μm wavelength, corresponding to the decrease in the spacing from 7.9 to 5.5 μm. The peak transmittance increased to 91% by an antireflection coating on the outer surface of the filter. This coating was effective to suppress the interference inside the Si plates that created a complicated spectrum.

Paper Details

Date Published: 1 March 2006
PDF: 11 pages
Proc. SPIE 6125, Silicon Photonics, 61250Y (1 March 2006); doi: 10.1117/12.647503
Show Author Affiliations
Itsunari Yamada, Ryukoku Univ. (Japan)
Kazuya Kimura, Ryukoku Univ. (Japan)
Yutaka Yamagishi, Horiba, Ltd. (Japan)
Mitsunori Saito, Ryukoku Univ. (Japan)

Published in SPIE Proceedings Vol. 6125:
Silicon Photonics
Joel A. Kubby; Graham T. Reed, Editor(s)

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