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Proceedings Paper

New nanofabrication technique using overlay for 15-nm zone plate
Author(s): Weilun Chao; Bruce D. Harteneck; Erik H. Anderson; David Attwood; J. Alexander Liddle
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Paper Abstract

Soft x-ray zone plate microscopy has proven to be a valuable imaging technique for nanoscale studies. It complements nano-analytic techniques such as electron and scanning probe microscopies, and offers a unique set of capabilities including high spatial resolution, natural elemental/chemical and magnetic sensitivities, large permissible sample thickness, and a myriad of in-situ sample environments. In this paper, a new zone plate fabrication technique based on overlaying complementary, semi-dense patterns is described. The new technique permits zone plates with sub-20 nm zones, which are extremely challenging for conventional fabrication processes, to be fabricated. With the new technique, zone plates of 15 nm outermost zone width were successfully fabricated for the first time, yielding a spatial resolution better than 15 nm. Zone plates of 10 nm outer zones, as well as 3-D zone plate structures, which cannot be fabricated using conventional zone plate fabrication processes, are anticipated with the overlay technique.

Paper Details

Date Published: 23 January 2006
PDF: 6 pages
Proc. SPIE 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV, 61100D (23 January 2006); doi: 10.1117/12.647164
Show Author Affiliations
Weilun Chao, Lawrence Berkeley National Lab. (United States)
Univ. of California, Berkeley (United States)
Bruce D. Harteneck, Lawrence Berkeley National Lab. (United States)
Erik H. Anderson, Lawrence Berkeley National Lab. (United States)
David Attwood, Lawrence Berkeley National Lab. (United States)
Univ. of California, Berkeley (United States)
J. Alexander Liddle, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 6110:
Micromachining Technology for Micro-Optics and Nano-Optics IV
Eric G. Johnson; Gregory P. Nordin; Thomas J. Suleski, Editor(s)

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