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Proceedings Paper

Lateral melt expulsion and debris deposition during small-scale femtosecond laser ablation
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Paper Abstract

Various ablation processes including melt expulsion and debris deposition are demonstrated for intense laser ablation of bulk crystalline Si samples and thin copper films at different laser fluences by single tightly and multiple loosely focused laser pulses, respectively. Implications of our results to high-intensity femtosecond laser nano- and micro-machining of solids are discussed.

Paper Details

Date Published: 1 March 2006
PDF: 9 pages
Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61061C (1 March 2006); doi: 10.1117/12.647146
Show Author Affiliations
Sergey I. Kudryashov, Arkansas State Univ. (United States)


Published in SPIE Proceedings Vol. 6106:
Photon Processing in Microelectronics and Photonics V
David B. Geohegan; Frank Träger; Jan J. Dubowski; Tatsuo Okada; Craig B. Arnold; Michel Meunier; Andrew S. Holmes, Editor(s)

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