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Proceedings Paper

Wet etching of sol-gel deposited lead lanthanum zirconate titanate for photonic crystal applications
Author(s): Yun-Ju Lee; Ganapathi Subramania; Paul G. Clem
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Paper Abstract

Arrays of lead lanthanum zirconate titanate disks are fabricated on Pt electrodes by wet etching of thin films processed from sol-gel precursors, which may be applicable as defect cavities with electrically tunable resonance wavelength when embedded inside 2-D Si photonic crystals. Using e-beam lithography followed by sputtering and liftoff, Pt etch masks with diameters down to 1μm are deposited on pyrolyzed PLZT films. Wet etching using diluted hydrochloric acid generates discrete PLZT disks with integrated top and bottom Pt electrodes. The dimensions of the PLZT disks are determined by the diameter of the Pt etch mask, although undercutting becomes a significant issue as etch mask size decreased. The effects of varying PLZT pyrolysis temperature on the etching rate and film quality after sintering are examined. Dielectric testing of wet etched PLZT film after sintering showed that the devices have short circuited, suggesting that the deformation of the top Pt electrode over the undercut PLZT during sintering may significantly hinder the applicability of the current wet etching technique. Alternate methods for the patterning of PLZT for integration into photonic crystals are proposed.

Paper Details

Date Published: 1 March 2006
PDF: 6 pages
Proc. SPIE 6128, Photonic Crystal Materials and Devices IV, 612814 (1 March 2006); doi: 10.1117/12.646570
Show Author Affiliations
Yun-Ju Lee, Sandia National Labs. (United States)
Ganapathi Subramania, Sandia National Labs. (United States)
Paul G. Clem, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 6128:
Photonic Crystal Materials and Devices IV
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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