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Proceedings Paper

A new fabrication technique for complex refractive micro-optical systems
Author(s): Massimo Tormen; Alessandro Carpentiero; Enrico Ferrari; Stefano Cabrini; Dan Cojoc; Enzo Di Fabrizio
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Paper Abstract

We present a new method that allows to fabricate structures with tightly controlled three-dimensional profiles in the 10 nm to 100 μm scale range. This consists of a sequence of lithographic steps such as Electron Beam (EB) or Focused Ion Beam (FIB) lithography, alternated with isotropic wet etching processes performed on a quartz substrate. Morphological characterization by SEM and AFM shows that 3D structures with very accurate shape control and nanometer scale surface roughness can be realized. Quartz templates have been employed as complex system of micromirrors after metal coating of the patterned surface or used as stamps in nanoimprint, hot embossing or casting processes to shape complex plastic elements. Compared to other 3D micro and nanostructuring methods, in which a hard material is directly "sculptured" by energetic beams, our technique requires a much less intensive use of expensive lithographic equipments, for comparable volumes of structured material, resulting in dramatic increase of throughput. Refractive micro-optical elements have been fabricated and characterized in transmission and reflection modes with white and monochromatic light. The elements produce a distribution of sharp focal spots and lines in the three dimensional space, opening the route for applications of image reconstruction based on refractive optics.

Paper Details

Date Published: 23 January 2006
PDF: 9 pages
Proc. SPIE 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV, 611005 (23 January 2006); doi: 10.1117/12.646306
Show Author Affiliations
Massimo Tormen, Istituto Nazionale della Fisica della Materia (Italy)
Alessandro Carpentiero, Istituto Nazionale della Fisica della Materia (Italy)
Enrico Ferrari, Istituto Nazionale della Fisica della Materia (Italy)
Univ. of Trieste (Italy)
Stefano Cabrini, Istituto Nazionale della Fisica della Materia (Italy)
Dan Cojoc, Istituto Nazionale della Fisica della Materia (Italy)
Enzo Di Fabrizio, Istituto Nazionale della Fisica della Materia (Italy)
Univ. Magna Græcia (Italy)


Published in SPIE Proceedings Vol. 6110:
Micromachining Technology for Micro-Optics and Nano-Optics IV
Eric G. Johnson; Gregory P. Nordin; Thomas J. Suleski, Editor(s)

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