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Proceedings Paper

Novel optical-waveguide sensing platform based on input grating coupler
Author(s): Sonia Grego; Sudipto Naskar; Aarish M Patel; Alan Huffman; Christopher A. Bower; Brian R. Stoner
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Paper Abstract

Silicon oxynitride optical waveguides with a grating coupler were used for a label-free detection approach that measures the change of refractive index at the grating surface. Two approaches were used for the grating fabrication: (i) commercially available linear gratings were used as stamps for imprint lithography and the pattern was transferred by dry-etching; (ii) polystyrene microspheres self-assembly in an ordered close-packed array was exploited to obtain a two-dimensional grating with hexagonal symmetry. Optical coupling into slab waveguides of both visible (633nm) and tunable infrared (1550 nm) lasers was characterized as a function of incident angle in a custom-made automated apparatus. Sensitivity to different aqueous solutions was demonstrated with low loss waveguides fabricated using low-frequency plasma-enhanced chemical vapor deposition. The exploitation of the tunability of telecom infrared lasers and of the two-dimensional hexagonal grating coupler has the ultimate goal of providing a high performance, compact sensor that does not require mechanical moving parts.

Paper Details

Date Published: 24 February 2006
PDF: 11 pages
Proc. SPIE 6123, Integrated Optics: Devices, Materials, and Technologies X, 61230D (24 February 2006); doi: 10.1117/12.646302
Show Author Affiliations
Sonia Grego, RTI International (United States)
Sudipto Naskar, RTI International (United States)
Aarish M Patel, RTI International (United States)
Alan Huffman, RTI International (United States)
Christopher A. Bower, RTI International (United States)
Brian R. Stoner, RTI International (United States)


Published in SPIE Proceedings Vol. 6123:
Integrated Optics: Devices, Materials, and Technologies X
Yakov Sidorin; Christoph A. Waechter, Editor(s)

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