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Proceedings Paper

Optical-maskless patterning for nanostructuring
Author(s): Rajesh Menon; Michael E. Walsh; David Chao; Amil Patel; Henry I. Smith
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Date Published:
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Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 610610; doi: 10.1117/12.646112
Show Author Affiliations
Rajesh Menon, LumArray Inc. (United States)
Massachusetts Institute of Technology (United States)
Michael E. Walsh, LumArray Inc. (United States)
Massachusetts Institute of Technology (United States)
David Chao, Massachusetts Institute of Technology (United States)
Amil Patel, Massachusetts Institute of Technology (United States)
Henry I. Smith, LumArray Inc. (United States)
Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 6106:
Photon Processing in Microelectronics and Photonics V
David B. Geohegan; Frank Träger; Jan J. Dubowski; Tatsuo Okada; Craig B. Arnold; Michel Meunier; Andrew S. Holmes, Editor(s)

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