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Proceedings Paper

An injection micromixer fabricated by improved SU-8 processing for biochemical microfluidic systems
Author(s): Changgeng Liu; Zhong-geng Ling; Kun Lian; Jost Goettert; Josef Hormes
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Paper Abstract

In this research, first a modular polymer-based (PMMA) injection micromixer prototype has been designed, fabricated and tested. This micromixer is easy to be integrated into biochemical microfluidic systems under development for BioMagnetICs DARPA funded project at CAMD. To improve the mixing efficiency, layout of micronozzles of the mixer was optimized according to the simulation results. Also because SU-8, an epoxy-based negative photoresist, has high chemical resistance, an SU-8 injection mixer was designed and fabricated to run some biochemical sample liquids. Internal stress in patterned SU-8 structures has been reduced and multi-layer SU-8 processing has been successfully developed to fabricate SU-8 injection mixer.

Paper Details

Date Published: 23 January 2006
PDF: 7 pages
Proc. SPIE 6112, Microfluidics, BioMEMS, and Medical Microsystems IV, 61120G (23 January 2006); doi: 10.1117/12.646049
Show Author Affiliations
Changgeng Liu, Louisiana State Univ. (United States)
Zhong-geng Ling, Louisiana State Univ. (United States)
Kun Lian, Louisiana State Univ. (United States)
Jost Goettert, Louisiana State Univ. (United States)
Josef Hormes, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 6112:
Microfluidics, BioMEMS, and Medical Microsystems IV
Ian Papautsky; Wanjun Wang, Editor(s)

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